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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH03104222(A)
申请公布日期
1991.05.01
申请号
JP19890242474
申请日期
1989.09.19
申请人
FUJI ELECTRIC CO LTD
发明人
ISHIOKA HISAMICHI
分类号
H01L21/302;H01L21/205;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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