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发明名称
DOPING DEVICE
摘要
申请公布号
JPH03103388(A)
申请公布日期
1991.04.30
申请号
JP19890237537
申请日期
1989.09.12
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
IWASAKI ATSUSHI;SONOKAWA SUSUMU;HAYASHI TOSHIRO
分类号
C30B15/04;C30B29/06;H01L21/208
主分类号
C30B15/04
代理机构
代理人
主权项
地址
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