发明名称 Thermally stable magnetic deflection assembly and method of making same
摘要 A thermally stable magnetic deflection assembly for use in an electron or particle beam machine with several separately potted magnetic coils spaced apart and arranged in a particular vertical position on a central pipe. Non metallic, low coefficient of thermal expansion, highly thermally conductive materials are used throughout and means are provided for maintaining the entire assembly at a desired temperature. Also disclosed is a method of making a thermally stable magnetic deflection assembly.
申请公布号 US5012104(A) 申请公布日期 1991.04.30
申请号 US19900524508 申请日期 1990.05.17
申请人 ETEC SYSTEMS, INC. 发明人 YOUNG, LYDIA J.
分类号 H01L21/027;H01J37/147;H01J37/30 主分类号 H01L21/027
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