| 摘要 |
An object position measuring system for use in measuring, without contact with an object displacement amounts of an object, conditions of an object surface and the like; the system having a light beam source, a diffraction grating for diffracting light beam emitted from the light beam source, a converging optical arrangement for orienting and converging a pair of positive and negative diffracted beam components of the beam diffracted by the diffraction grating onto the object and for orienting and converging the diffracted beam reflected by the object onto the diffraction grating, and a screen for displaying interference fringes of the reflected diffracted beam components diffracted by the diffraction grating. According to this system, the position of the object is determined by diffracting through the diffracting grating beam emitted from the source, projecting the pair of diffracted beam components onto the object, causing the pair of diffracted beam components reflected by the object to interfere with each other and then by evaluating the resultant interference fringes.
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