| 摘要 |
PURPOSE:To decrease the propagation loss of an org. optical waveguide by inserting an org. nonlinear optical material into a part of the optical waveguide and patterning the material by a self-alignment method. CONSTITUTION:A layer 2 consisting of TixSiyOz or a-SixNyOz: H is formed on an underlying substrate 1 and the org. optical waveguide 3 is formed thereon. The layer 2 is further coated with a layer 4 consisting of the same material as the material of the layer 2. The film formation of the coating layer 4 is executed by sputtering, plasma CVD, photo-CVD, ion plating, vapor deposition, ion assisted vapor deposition, etc.. The refractive index of the coating layer can be controlled by changing the compsn. of the material. The difference in the refractive index between the waveguide and the coating material around the same decreases in such waveguide and, therefore, the light scattering by the zigzag of the side face is suppressed. The org. optical waveguide which lessens the propagation loss and the degradation of the nonlinear optical effect is obtd. in this way. |
