发明名称 DEVICE FOR ELECTRICALLY EXCITING A GAS WITH MICROWAVES
摘要 A device (10) with a waveguide (11) powered by a microwave transmitter having an output slot (12) in an outer wall (13) to ignite and maintain a gas discharge and a discharge chamber containing a gas discharge path (15) and arranged parallel to the waveguide (11) in the region of the electric slot field (14). In order to achieve the most uniform possible excitation, especially longitudinally to the gas discharge path (15), the device is constructed so that the slot (12) is a longitudinal one, at least substantially parallel to the longitudinal axis of the waveguide (11), in a radially outside wall (13) of the waveguide (11) and the discharge chamber (16) extends with its gas discharge path (15) along the entire length of this longitudinal slot (12).
申请公布号 AU6418790(A) 申请公布日期 1991.04.28
申请号 AU19900064187 申请日期 1990.10.05
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG 发明人 JURGEN KLEIN;THOMAS RETTICH;SILKE PFLUGER;PETER LOOSEN
分类号 H01J37/32;H01J65/04 主分类号 H01J37/32
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