| 摘要 |
PURPOSE:To enable quantitative plotting of exfoliation on a junction interface and others by turning a received ultrasonic reflected wave into an RF signal (a signal detected by probing and amplified by a receiver), by calculating a function by a specific method by utilizing the maximum value of a positive peak of this signal and the absolute value of a negative peak thereof, and by displaying the function. CONSTITUTION:A high-frequency flaw-detecting unit 1 equipped with an ultrasonic probe delivers data obtained from the probe to an arithmetic element 4. The arithmetic element 4 controls a scanning mechanism element 2 by a mechanism element controller 3 so as to make the probe scan an appropriate part of a material. A reflected wave of an ultrasonic wave emitted from the ultrasonic probe toward the inside of the material to be inspected is received and turned into an RF signal. The maximum value of a positive peak of the RF signal and the absolute value of a negative peak thereof are detected, the sum of the maximum value of the positive peak and the absolute value of the negative peak is calculated, and the ratio between a value of this sum and either the maximum value of the positive peak or the absolute value of the negative peak is calculated. A function whose parameters are the values of the sum and the ratio are displayed in a C scope, and thereby whether a junction part is exfoliated can be inspected. |
