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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03101263(A)
申请公布日期
1991.04.26
申请号
JP19890237314
申请日期
1989.09.14
申请人
KAWASAKI STEEL CORP
发明人
IWAHASHI MASANORI
分类号
H01L21/336;H01L21/8238;H01L27/092;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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