| 摘要 |
<p>PURPOSE:To easily recover gaseous fluorocarbon by providing an adsorption unit and a desorption unit and furnishing a cartridge-type adsorption tank in both units. CONSTITUTION:The gaseous fluorocarbon 2 from a fluorocarbon cleaning machine 1 is introduced into the adsorption unit 4 by a blower 5 through a collecting duct 3 and adsorbed by the activated carbon packed in the adsorption tank 6. When adsorption is finished, the tank 6 is detached from the adsorption unit 4 and set in the desorption unit 7. The gaseous fluorocarbon adsorbed by the tank 6 in the desorption unit 7 is returned to the raw liq. fluorocarbon and recovered. The tank 6 from which the liq. fluorocarbon has been recovered is again set in the adsorption unit 4 and used to absorb the gaseous fluorocarbon volatilized from the machine 1. Consequently, the setting space is reduced.</p> |
