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发明名称
LICHTEMPFINDLICHE KUNSTSTOFFZUSAMMENSETZUNG.
摘要
申请公布号
DE3768663(D1)
申请公布日期
1991.04.25
申请号
DE19873768663
申请日期
1987.01.07
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
SUGIYAMA, HISASHI, TOTSUKA-KU YOHOHAMA-SHI KANAGAWA-KEN, JP;NATE, KAZUO, MACHIDA-SHI TOKYO, JP;INOUE, TAKASHI, TOTSUKA-KU YOKOHAMA-SHI KANAGAWA-KEN, JP;MIZUSHIMA, AKIKO, YOKOHAMA-SHI KANAGAWA-KEN, JP
分类号
G03C1/72;G03C1/00;G03C1/675;G03F7/022;G03F7/039;G03F7/075;G03F7/11;G03F7/26;H01L21/027;(IPC1-7):G03F7/075
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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