| 摘要 |
<p>PURPOSE:To form a driver circuit having high reliability without necessitating a single crystallization process by eliminating a part of a single crystal semiconductor wafer, and thereafter, forming a liquid crystal display part in its eliminated part, and also, forming a driver circuit in a residual part. CONSTITUTION:The Si wafer 2 of a single crystal is stuck to one face of a quartz wafer 1, and thereafter, by grinding the Si wafer 2, its film thickness is finished to about 2mum. Subsequently, the Si wafer 2 of the part corresponding to a display part is eliminated by etching, and thereafter, a driver circuit part 4 is formed in the residual wafer 2, and next, a TFT array is formed in the part 3 from which the Si wafer 2 is eliminated and a liquid crystal display part 5 of an active matrix type is provided. Subsequently, a transparent electrode formation, a liquid crystal orientation processing, etc., are executed, an opposed substrate 6 is stuck, and thereafter, by executing liquid crystal sealing, a liquid crystal display device of a driver monolithic type is obtained. In such a manner, the reliability of the driver circuit becomes high, and the liquid crystal display device of a driver monolithic type having a high performance can be obtained.</p> |
