| 摘要 |
PURPOSE:To enable a stable control of the temperature of a laser gas which is fed to a discharge part and is circulated by providing a main heat exchanger using a low temperature refriegerant on a gas inlet side of the discharge part in a gas circuit and an auxiliary heat exchanger using water on a gas outlet side of the discharge part in it respectively. CONSTITUTION:A laser gas in a gas circuit 1 circulates in an arrow head direction by a gas circulator 3 and an inlet temperature TI of the laser gas falls to -40 deg.C by an indirect heat exchanging with a low temperature refriegerant in a main heat exchanger 6 to be sent to a discharge part 2. Thereafter, an outlet temperature TO of the laser gas in the discharge part 2 rises to 60 deg.C when emitting a laser by a discharge. Then, an outlet temperature TM of the laser gas in an auxiliary heat exchanger 7 falls to about 20 deg.C by the indirect heat exchanging with water in it. Further, the laser gas is sent to the main heat exchanger 6 by the gas circular 3 and the temperature of the laser gas falls to -40 deg.C again to be circulated to the discharge part 2. also, while not discharging, the laser gas cooled at -40 deg.C is passed through the discharge part 2 without changing its temperature. Then, the laser gas temperature rises to about 20 deg.C by the auxiliary heat exchanger 7 and the laser gas is cooled by the main heat exchanger 6 in the same manner as while discharging. Thereby, the stable temperature control becomes possible and the damage of the circulator 3 and the quantity of the low temperature refriegerant can be reduced. |
