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发明名称
BANDSCHLEUSE FUER VAKUUMBESCHICHTUNGSANLAGEN
摘要
申请公布号
DD289295(A5)
申请公布日期
1991.04.25
申请号
DD19890334921
申请日期
1989.11.28
申请人
FI MANFRED VON ARDENNE,DE
发明人
SENF,JOACHIM,DE;JAESCH,GUENTER,DE;KUEHN,GERHARD,DE;ZSCHIESCHANG,ERWIN,DE;FOERSTER,HARRY,DE;HOLZ,EBERHARD,DE;PRADEL,GUENTER,DE
分类号
C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/56
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