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发明名称
VERFAHREN UND VORRICHTUNG ZUM AUFTRAGEN VON FILMEN.
摘要
申请公布号
DE3768665(D1)
申请公布日期
1991.04.25
申请号
DE19873768665
申请日期
1987.01.12
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
ISHIHARA, SHUNICHI, EBINA-SHI, KANAGAWA-KEN, JP;HIROOKA, MASAAKI, TORIDE-SHI IBARAKI-KEN, JP;HANNA, JUN-ICHI, YOKOHAMA-SHI KANAGAWA-KEN, JP;SHIMIZU, ISAMU, MIDORI-KU KANAGAWA-KEN, JP
分类号
H01L31/04;C23C16/02;C23C16/452;H01L21/205;(IPC1-7):C23C16/44
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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