INSPECTION APPARATUS FOR MOUNTING BOARD

摘要

PURPOSE:To detect three-dimensional defects by guiding scattering light obtained by scanning with laser light to a position detecting element, operating luminance data and height data based on the obtained amount of light, and substituting and outputting the height data according to the luminance data. CONSTITUTION:A printed board 101 in which components 102 are mounted is moved with a transfer means 103. The upper surface of the board 101 is scanned with laser light 106 from a laser light source 105 through a polygon mirror 107 and an ftheta lens 109. The scattering light obtained by the reflection is converged on a position detecting element 112 through a reflecting mirror 110 which is provided between the board 101 and the lens 109, the lens 109 and the mirror 107. The luminance data and the height data are operated in an image operation means 114 based on the obtained amount of light. The height data are substituted in correspondence with the luminance data in an interpolating operation means 116 and the result is outputted. The data are compared with reference height data by a decision means 115, and the quality of the mounted state of the component is decided.