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发明名称
APPARATUS FOR ION BEAM WORK
摘要
申请公布号
EP0168056(B1)
申请公布日期
1991.04.24
申请号
EP19850108708
申请日期
1985.07.12
申请人
HITACHI, LTD.
发明人
SHIMASE, AKIRA;YAMAGUCHI, HIROSHI;HARAICHI, SATOSHI;MIYAUCHI, TATEOKI
分类号
H01J37/28;G01N23/225;G21K5/04;H01J37/22;H01J37/30;H01J37/304;H01L21/265;H01J37/305;H01L21/027;H01L21/30;H01L21/66
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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