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发明名称
FORMATION OF SOI STRUCTURE
摘要
申请公布号
JPH0399421(A)
申请公布日期
1991.04.24
申请号
JP19890236249
申请日期
1989.09.12
申请人
SANYO ELECTRIC CO LTD
发明人
TAKEUCHI KUNIO
分类号
H01L21/302;H01L21/20;H01L21/3065;H01L21/324
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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