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发明名称
SEMICONDUCTOR GROWING EQUIPMENT
摘要
申请公布号
JPH0397223(A)
申请公布日期
1991.04.23
申请号
JP19890234919
申请日期
1989.09.11
申请人
FUJITSU LTD
发明人
KUSUKI TOSHIHIRO
分类号
C30B15/00;C30B15/10;C30B29/40;H01L21/208
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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