发明名称 |
Bar and crucible magnetic suspension for a crystal-growing apparatus |
摘要 |
A crystalline bar is drawn by a zone-melting process or from a melt in a crucible utilizing a magnetic suspension housing, in addition to an axial stabilization magnet, a radial stabilizer surrounding the core and including sensors for the radial position of the core-operating controllers for electromagnets surrounding the core to restore the core to its setpoint position. The fully magnetic suspension of the core eliminates friction while allowing enclosure of the crystal growth compartment to improve the quality of the crystal growth process.
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申请公布号 |
US5009865(A) |
申请公布日期 |
1991.04.23 |
申请号 |
US19850772557 |
申请日期 |
1985.09.04 |
申请人 |
KERNFORSCHUNGSANLAGE JUELICH GMBH |
发明人 |
BODEN, KARL;IBACH, HARALD;LINKE, UDO |
分类号 |
C30B13/32;C30B15/30;H01L21/18;H01L21/208 |
主分类号 |
C30B13/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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