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发明名称
Apparatus and process for growing crystals of semiconductor materials
摘要
申请公布号
US5009862(A)
申请公布日期
1991.04.23
申请号
US19900527887
申请日期
1990.05.23
申请人
MITSUBISHI KINZOKU KABUSHIKI KAISHA
发明人
KIDA, MICHIO;ARAI, YOSHIAKI;SAHIRA, KENSHO
分类号
C30B15/12
主分类号
C30B15/12
代理机构
代理人
主权项
地址
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