| 摘要 |
A laser processor provided with a pulse oscillating laser light source, an exciter for exciting the laser light source on a trigger signal for pusle oscillation, a beam quality adjusting device for adjusting a beam quality as monitoring the pulse-oscillated laser light partly at least, a working apparatus for exposing or processing a workpiece by projecting the adjusted laser light thereon. The laser light from a laser light source side is intercepted by a shutter while it is not used on a sequence on a working apparatus side, thereby operating the laser light source for self-oscillation at a low frequency of 1 to 2 hz, for example; the laser light source is then operated for self-oscillation at a frequency higher than that with the shutter closed therefor when a quality abnormal signal is generated from an abnormal detector upon detection of a beam quality coming outside a standard.
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