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发明名称
DEPOSIZIONE CHIMICA DA VAPORI MEDIANTE LASER USANTE EROGAZIONE DI FASCIO OTTICO ATTRAVERSO FIBRE
摘要
申请公布号
IT1227653(B)
申请公布日期
1991.04.23
申请号
IT19880022803
申请日期
1988.11.30
申请人
GENERAL ELECTRIC CO
发明人
TUSHAR SHASHIKANT CHANDE
分类号
C30B25/00;C23C16/04;C23C16/48;H01L21/205;H01L21/263;(IPC1-7):H01L/
主分类号
C30B25/00
代理机构
代理人
主权项
地址
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