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发明名称
Method of forming diamond film
摘要
申请公布号
US5009923(A)
申请公布日期
1991.04.23
申请号
US19900544800
申请日期
1990.06.27
申请人
NISSIN ELECTRIC CO., LTD.
发明人
OGATA, KIYOSHI;ANDO, YASUNORI;KAMIJO, EIJI
分类号
C23C14/06;C23C14/22;C30B23/02
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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