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发明名称
PROCESS FOR MANUFACTURING OF COARSE GRAINED CONTACT RASTER HAVING IRREGULAR STRUCTURE
摘要
申请公布号
SU1644076(A1)
申请公布日期
1991.04.23
申请号
SU19894629400
申请日期
1989.01.02
申请人
OMSKIJ POLT INSTITUT
发明人
GANIEV DZHEJMARS KH,SU;SYSUEV IGOR A,SU;SHVAB YURIJ A,SU
分类号
G03F5/00
主分类号
G03F5/00
代理机构
代理人
主权项
地址
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