| 摘要 |
<p>PURPOSE:To allow a sample to be removed from a base in the state that the sample is separated from holding rods by providing a resetting rod for separating the end of the sample from the holding rods, which is set apart from the end of the sample after separating the end of the sample from the holding rods. CONSTITUTION:First, after an observed wafer 4 is transferred from a sample room to a sample exchange room together with a base 2, an air lock valve is closed. In such a state, a holding rod 1d is moved to a F direction by operating a holding rod drive mechanism through the outside and separated from the end of the wafer 4. Then, if the atmosphere is led into the sample exchange room, a piston 8 is pushed into a cylinder 7 against the compression of a oil spring 10, because of vacuum in the cylinder 7. The atmosphere is gradually led into the cylinder 7 through a small hole 8 and brings no pressure difference, so that the piston 8 is moved to the leftmost end by the coil spring 10 to separated a resetting rod 6 from the end of the wafer 4. In such a state, the wafer is clamped by a robot and taken out to the outside of the sample exchange room, and a new wafer is placed on the base 2.</p> |
