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发明名称
摘要
申请公布号
JPH0328810(B2)
申请公布日期
1991.04.22
申请号
JP19820075265
申请日期
1982.05.07
申请人
HITACHI LTD
发明人
KUNYOSHI SHINJI;TAKANASHI AKIHIRO;HOSAKA SUMIO;KAWAMURA YOSHIO;KUROSAKI TOSHISHIGE;TERASAWA TSUNEO
分类号
H01L21/30;G03F7/20;G03F9/00;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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