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发明名称
VAPOR GROWING APPARATUS
摘要
申请公布号
JPH0395924(A)
申请公布日期
1991.04.22
申请号
JP19890232341
申请日期
1989.09.07
申请人
TOSHIBA MACH CO LTD
发明人
KOMIYAMA KICHIZO;FUKUYAMA SATOSHI
分类号
C30B25/10;C23C16/44;C23C16/46;H01L21/205
主分类号
C30B25/10
代理机构
代理人
主权项
地址
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