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发明名称
SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0393221(A)
申请公布日期
1991.04.18
申请号
JP19890230092
申请日期
1989.09.05
申请人
FUJITSU LTD
发明人
KONDO MASATO;OKUDA KOJI
分类号
C30B29/68;H01L21/20;H01L21/205;H01L29/201
主分类号
C30B29/68
代理机构
代理人
主权项
地址
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