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发明名称
PHOTODETECTION
摘要
申请公布号
JPH0394128(A)
申请公布日期
1991.04.18
申请号
JP19890232211
申请日期
1989.09.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOKUDA YASUKI;TSUKADA NORIAKI
分类号
G01J1/02;G01J1/44;G01J3/02;H01L31/10
主分类号
G01J1/02
代理机构
代理人
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地址
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