| 摘要 |
PURPOSE:To easily form a large number of very small holes with high roundness and high accuracy by perforating a green sheet before baking and filling the holes with a wire composed of Pt, Ir or an alloy thereof and baking the wire filled green sheet before removing the filled wires. CONSTITUTION:A green sheet 1 before baking is perforated by a drill or press and the formed holes 2 are subsequently filled with a wire 3 composed of Pt, Ir or an alloy thereof and, after baking, the filled wires are removed by acid treatment, discharge processing, a drill or a press. Since the green sheet is perforated, the holes can be easily formed and, since Pt or Ir being a thermally stable noble metal having a high m.p. or an alloy thereof is used, deformation and oxidation at the time of baking are eliminated and the holes preliminarily opened in order to hold a hole diameter receives no effect of contraction due to baking and, further, the wires are removed by acid treatment or the like and the accurate holes can be obtained. |
