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发明名称
LASERABTASTMIKROSKOP.
摘要
申请公布号
DE3678142(D1)
申请公布日期
1991.04.18
申请号
DE19863678142
申请日期
1986.12.04
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
KIMURA, SHIGEHARU HITACHI DAI 4, KOKUBUNJI-SHI TOKYO, JP;MUNAKATA, CHUSUKE, NISHITAMA-GUN TOKYO, JP
分类号
G01N21/17;G02B21/00;(IPC1-7):G02B21/00
主分类号
G01N21/17
代理机构
代理人
主权项
地址
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