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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPH0394070(A)
申请公布日期
1991.04.18
申请号
JP19890229844
申请日期
1989.09.05
申请人
KOKUSAI ELECTRIC CO LTD
发明人
ISHIZU HIDEO;IKEDA FUMIHIDE;NAKAMURA SHUICHI;KOBAYASHI HIDEO;KASAHARA OSAMU
分类号
C23C16/44;C23C16/54;H01L21/205;H01L21/285;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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