SEMICONDUCTOR DEVICES HAVING CLOSELY SPACED DEVICE REGIONS FORMED USING A SELF ALIGNING REVERSE IMAGE FABRICATION PROCESS,申请号EP19890480155-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICES HAVING CLOSELY SPACED DEVICE REGIONS FORMED USING A SELF ALIGNING REVERSE IMAGE FABRICATION PROCESS
摘要
申请公布号	EP0366587(A3)	申请公布日期	1991.04.17
申请号	EP19890480155	申请日期	1989.09.26
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	CHU, SHAO-FU SANFORD;KU, SAN-MEI;LANGE, RUSSELL C.;SHEPARD, JOSEPH FRANCIS;TSANG, PAUL JA-MIN;WANG, WEN-YUAN
分类号	H01L29/73;H01L21/331;H01L21/60;H01L21/8249;H01L27/06;H01L29/732;(IPC1-7):H01L21/82;H01L21/033;H01L21/285	主分类号	H01L29/73
代理机构		代理人
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