| 摘要 |
PURPOSE:To prevent the nozzle from being broken even if the nozzle receives external force and to prevent the failure of a condenser lens, etc., by forming a nozzle holder of an elastic member in such a manner that the nozzle can be deformed when subjected to the external force. CONSTITUTION:The nozzle is bent from a tight contact coil 9 part and parts from a projecting part 8 of a work piece 7 as shown by virtual line when the projecting part 8 and the nozzle 2 come into contact or collision during laser beam processing. Since the impact is relieved by the effect of the tight contact coil spring 9 and the elastic member 11 constituted of an elastic material 10, the impact force is not transmitted to the condenser lens 5 and a lens holder 4, etc. The nozzle can be freely deformed even against the external force in the direction nearly perpendicular thereto if the elastic member 11 is constituted of metallic bellows 9b. |
