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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH0390568(A)
申请公布日期
1991.04.16
申请号
JP19890226457
申请日期
1989.08.31
申请人
RICOH CO LTD
发明人
SUGAWARA TOMOAKI;TANAKA MASAHARU;SHIBATA KIYOTO;TEZUKA SHINJI
分类号
C23C14/34;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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