| 摘要 |
<p>PURPOSE:To detect the mode of a laser beam with high accuracy by providing an X(Y) axis wire which is driven in a direction parallel with a surface obtained by combining the axial centers of plural laser beams and a surface provided in a direction intersecting orthogonally with the laser beam. CONSTITUTION:When a pulse motor 4A is driven, ball screws 6A2 are simultaneously rotated in the same direction through a timing belt 5A and a wire 8A moves up and down. Then, a part of the laser beam reflected on the wire 8A is detected by photosensors 4Y1 and 4Y2 attached to the upper surface of a lower frame 10a2. The upper and lower ends of the laser beams 3A and 3B are detected by the sensor 4h in the back of the lower frame and the right and left ends of the beams 3A and 3B are detected by the sensor 4w of a right frame respectively. Meanwhile, when a pulse motor 4B is driven, the ball screws 6B1 and 6B2 are simultaneously rotated in the same direction through a timing belt 7B and a wire 8B moves from right to left. At this time, a part of the laser beam reflected on the wire 8B is detected by a photosensor 4X. Consequently, the beam is detected by linearly crossing the optical axes of the beams 3A and 3B in X and Y directions, so that measurement is performed with high accuracy.</p> |
