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发明名称
INDUCTION PLASMA DEVICE
摘要
申请公布号
JPH0389498(A)
申请公布日期
1991.04.15
申请号
JP19890227083
申请日期
1989.09.01
申请人
AGENCY OF IND SCIENCE & TECHNOL;JEOL LTD
发明人
MIZUNO KOICHI;WAKABAYASHI TAKESHIGE;HINUMA YUTAKA;AIZAWA REIJI;KUSHIYAMA AKIRA;KOBAYASHI SATORU;OUCHI HIDEO;AMANO TAKANOBU;KOMAKI HISASHI;HIRAKAWA YOSHIHARU
分类号
H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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