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发明名称
WAFER IDENTIFIER
摘要
申请公布号
JPH0388348(A)
申请公布日期
1991.04.12
申请号
JP19890226130
申请日期
1989.08.30
申请人
NEC YAMAGATA LTD
发明人
IGARASHI KINICHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
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