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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH0388359(A)
申请公布日期
1991.04.12
申请号
JP19890225004
申请日期
1989.08.31
申请人
SONY CORP
发明人
NOGUCHI TAKASHI
分类号
H01L21/302;H01L21/3065;H01L21/822;H01L27/04
主分类号
H01L21/302
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代理人
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