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发明名称
DIFFUSING FURNACE
摘要
申请公布号
JPH0388327(A)
申请公布日期
1991.04.12
申请号
JP19890226129
申请日期
1989.08.30
申请人
NEC YAMAGATA LTD
发明人
ISHIZAKI KATSUTOSHI
分类号
F27B17/00;F27D7/00;H01L21/22
主分类号
F27B17/00
代理机构
代理人
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地址
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