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发明名称
ALIGNMENT AND INSPECTION APPARATUS USING IT
摘要
申请公布号
JPH0384945(A)
申请公布日期
1991.04.10
申请号
JP19890222139
申请日期
1989.08.28
申请人
TOKYO ELECTRON LTD
发明人
YOKOTA KEIICHI
分类号
G01R31/26;G01R1/067;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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