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经营范围
发明名称
ION PROCESSOR
摘要
申请公布号
JPH0384842(A)
申请公布日期
1991.04.10
申请号
JP19890221036
申请日期
1989.08.28
申请人
NISSIN ELECTRIC CO LTD
发明人
NISHIGAMI YASUAKI
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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