FLOW RATE DETECTING METHOD,申请号JP19890220935-传众专利搜索

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发明名称	FLOW RATE DETECTING METHOD
摘要
申请公布号	JPH0384421(A)	申请公布日期	1991.04.10
申请号	JP19890220935	申请日期	1989.08.28
申请人	TOKYO ELECTRON LTD;TOKYO EREKUTORON KYUSHU KK	发明人	SAKAI HIROYUKI;MATSUMURA KIMIHARU
分类号	G01F1/00;B05D3/00;G01F1/34;H01L21/027	主分类号	G01F1/00
代理机构		代理人
主权项
地址

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