发明名称 THIN FILM PACKAGE FOR MIXED BONDING OF A CHIP
摘要 The disclosure describes a method of manufacturing a structure of a thin, flexible package assembly (10) that permits electrical devices (13, 17) to be bonded to an electrical circuit (12) utilizing mixed bonding techniques. A sacrificial metal carrier material (25) is used to support a thin polyimide or TEFLON substrate (11), through which openings, called "vias", are formed at locations where bonding pad areas are needed to affix electrical devices (13, 17). An electrical circuit (12) is formed on the thin flexible substrate (11), including making the vias conductive, utilizing known processes, and then, the sacrificial metal carrier material (25) is removed, as for example by etching it away, except in locations where metal bumps (21, 22, 23, 24) will be needed to bond a device (17) by thermo compression bonding.
申请公布号 EP0343379(A3) 申请公布日期 1991.04.10
申请号 EP19890107126 申请日期 1989.04.20
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 MCBRIDE, DONALD G.
分类号 H01L21/60;H01L21/603;H01L23/14;H01L23/498;H01L23/52;H01L23/538;H01L25/065;H01L25/07;H01L25/18;H05K1/18;H05K3/00;H05K3/40;(IPC1-7):H01L23/50 主分类号 H01L21/60
代理机构 代理人
主权项
地址