发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a semiconductor device wherein the capacitance of a memory cell does not decrease even if the micronization of a device advances by adding a three-dimensional capacitor to a planar cell. CONSTITUTION:An upper electrode is always earthed to GND, and the transfer gate transistor of the word line of a specified address turns on a signal entering through a bit line by a ROW address signal, and charge is accumulated through the lower electrode of the three-dimensional memory cell (oxide film) of a capacitor (oxide film) 2 and HIC capacitor. When reading out charge, the transfer gate transistor 3 of a specified address becomes ON by a ROW address signal, and the charge entering the memory cell is pulled out to the bit line 4, and is output being amplified through I/O or an amplifier.
申请公布号 JPH0385756(A) 申请公布日期 1991.04.10
申请号 JP19890223426 申请日期 1989.08.30
申请人 MITSUBISHI ELECTRIC CORP 发明人 KAWARABAYASHI SHINYA
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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