| 摘要 |
PURPOSE:To attain cutting with uniform power at all times by using a monitor output from a low pass filter to control an output light intensity from a laser source. CONSTITUTION:A photodetector 38 receiving a light radiating onto a master disk 15 or a photodetector receiving a reflected light from the master disk 15 and a low pass filter 39 averaging an electric signal output from the photodetector 38 are provided and an output signal from the low pass filter 39 controls the output luminous intensity from a laser source 1. When an acoustooptical effect optical modulator has a dispersion and a temperature characteristic or a secular change exists, power control is acted to compensate the change and always uniform and stable cutting is implemented. |
