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发明名称
PROCESS FOR PURIFYING NITROGEN TRIFLUORIDE GAS
摘要
申请公布号
EP0337294(A3)
申请公布日期
1991.04.10
申请号
EP19890106050
申请日期
1989.04.06
申请人
MITSUI TOATSU CHEMICALS, INCORPORATED
发明人
HARADA, ISAO;HOKONOHARA, HISASHI;YAMAGUTI, TOSHIAKI
分类号
C01B21/083;(IPC1-7):C01B21/083
主分类号
C01B21/083
代理机构
代理人
主权项
地址
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