发明名称 |
Method of making an electrostatic silicon accelerometer |
摘要 |
A solid state accelerometer having an all silicon sensor for measuring accelerational and gravitational forces. The accelerometer measuring system also has associated electronics that include an analog rebalance loop and a digitizer loop.
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申请公布号 |
US5006487(A) |
申请公布日期 |
1991.04.09 |
申请号 |
US19900499756 |
申请日期 |
1990.03.27 |
申请人 |
HONEYWELL INC. |
发明人 |
STOKES, JOHN F. |
分类号 |
G01P15/08;G01P15/125;G01P15/13 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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