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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH0382757(A)
申请公布日期
1991.04.08
申请号
JP19890219040
申请日期
1989.08.25
申请人
TERUMO CORP
发明人
YAMAGUCHI HIDEICHIRO;KATSUBE TERUAKI
分类号
C23C14/34;H01L21/203;H01L21/31
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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