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经营范围
发明名称
WET TYPE WASHER
摘要
申请公布号
JPH0382028(A)
申请公布日期
1991.04.08
申请号
JP19890218974
申请日期
1989.08.24
申请人
NEC CORP
发明人
TAKAGI NORIYUKI
分类号
H01L21/304;B08B3/10
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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